Thickness gage for the float-process hot zone.
Glass & Ceramics ¹1
Glass & Ceramics ¹2
The system for the temperature and thickness monitoring in the nanotechnology.
Low-Coherent Light Interferometry For Monitoring Of Technological Process In A Metalorganic Vapor-Phase Epitaxy
Optical Monitoring of Technological Parameters in Metal–Organic Vapor-Phase Epitaxy.
Novel technique for monitoring of processing in nanoelectronics.
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